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CCD Image Sensors in Deep-Ultraviolet - Li, FloraNathan, Arokia
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CCD Image Sensors in Deep-Ultraviolet - edition reliée, livre de poche

2005, ISBN: 9783540226802

[ED: Hardcover], [PU: Springer / Springer Berlin Heidelberg / Springer, Berlin], As the deep-ultraviolet (DUV) laser technology continues to mature, an increasing number of industrial and… Plus…

Frais d'envoiVersandkostenfrei, Versand nach Deutschland. (EUR 0.00) buecher.de GmbH & Co. KG
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CCD Image Sensors in Deep-Ultraviolet - Flora Li
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CCD Image Sensors in Deep-Ultraviolet - nouveau livre

2001, ISBN: 9783540226802

[ED: Buch], [PU: Springer-Verlag GmbH], Neuware - As the deep-ultraviolet (DUV) laser technology continues to mature, an increasing number of industrial and manufacturing applications are… Plus…

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CCD Image Sensors in Deep-Ultraviolet - nouveau livre

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ISBN: 9783540226802

[ED: Buch], [PU: Springer-Verlag GmbH], Neuware - As the deep-ultraviolet (DUV) laser technology continues to mature, an increasing number of industrial and manufacturing applications are… Plus…

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CCD Image Sensors in Deep-Ultraviolet - Flora Li
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Flora Li:
CCD Image Sensors in Deep-Ultraviolet - nouveau livre

2001, ISBN: 9783540226802

[ED: Buch], [PU: Springer-Verlag GmbH], Neuware - As the deep-ultraviolet (DUV) laser technology continues to mature, an increasing number of industrial and manufacturing applications are… Plus…

Frais d'envoiVersandkostenfrei, Versand nach Deutschland. (EUR 0.00) Buchhandlung - Bides GbR
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CCD Image Sensors in Deep-Ultraviolet Degradation Behavior and Damage Mechanisms - Li, Flora; Nathan, Arokia
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Li, Flora; Nathan, Arokia:
CCD Image Sensors in Deep-Ultraviolet Degradation Behavior and Damage Mechanisms - edition reliée, livre de poche

2005, ISBN: 354022680X

2005 Gebundene Ausgabe Mikrotechnologie - Mikrotechnik, Technologie / Mikrotechnologie, Sensor - Sensorik, Ingenieurwissenschaft - Ingenieurwissenschaftler, Maschinenbau, Materialwissen… Plus…

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Détails sur le livre
CCD Image Sensors in Deep-Ultraviolet: Degradation Behavior and Damage Mechanisms (Microtechnology and MEMS)

As the deep-ultraviolet (DUV) laser technology continues to mature, an increasing number of industrial and manufacturing applications are emerging. For example, the new generation of semiconductor inspection systems is being pushed to image at increasingly shorter DUV wavelengths to facilitate inspection of deep sub-micron features in integrated circuits. DUV-sensitive charge-coupled device (CCD) cameras are in demand for these applications. Although CCD cameras that are responsive at DUV wavelengths are now available, their long-term stability is still a major concern. This book describes the degradation mechanisms and long-term performance of CCDs in the DUV, along with new results of device performance at these wavelengths. TOC:Introduction.- Overview of CCD.- CCD Imaging in the Ultraviolet Regime.- Silicon.- Silicon Dioxide.- Si-SiO2 Interface.- General Effects of Radiation.- Effects of Radiation on CCDs.- UV-Induced Effects in Silicon.- UV-Laser-Induced Effects in SiO2.- UV-Laser-Induced Effects in the Si-SiO2 Interface.- CCD Measurements at 157 nm.- Design Optimizations for Future Research.- Concluding Remarks.- Glossary.

Informations détaillées sur le livre - CCD Image Sensors in Deep-Ultraviolet: Degradation Behavior and Damage Mechanisms (Microtechnology and MEMS)


EAN (ISBN-13): 9783540226802
ISBN (ISBN-10): 354022680X
Version reliée
Livre de poche
Date de parution: 2002
Editeur: Springer-Verlag GmbH

Livre dans la base de données depuis 2007-05-22T11:58:04+02:00 (Zurich)
Page de détail modifiée en dernier sur 2022-08-05T18:33:25+02:00 (Zurich)
ISBN/EAN: 354022680X

ISBN - Autres types d'écriture:
3-540-22680-X, 978-3-540-22680-2
Autres types d'écriture et termes associés:
Auteur du livre: flora
Titre du livre: mems, sensor, flora heidelberg, ccd, into the deep, deep value, damage, degradation, ultraviolet


Données de l'éditeur

Auteur: Flora Li; Arokia Nathan
Titre: Microtechnology and MEMS; CCD Image Sensors in Deep-Ultraviolet - Degradation Behavior and Damage Mechanisms
Editeur: Springer; Springer Berlin
232 Pages
Date de parution: 2005-03-01
Berlin; Heidelberg; DE
Langue: Anglais
160,49 € (DE)
164,99 € (AT)
177,00 CHF (CH)
Available
XII, 232 p. 84 illus.

BB; Hardcover, Softcover / Technik/Maschinenbau, Fertigungstechnik; Technische Anwendung von elektronischen, magnetischen, optischen Materialien; Verstehen; Ingenieurwissenschaften; Physik; CCD image sensor; Deep-UV damage mechanisms; Eximer laser; Photodiode; Sensor; UV photodiodes; design; imaging; integrated circuit; laser; optimization; semiconductor; technology; Optical Materials; Laser; Technology and Engineering; Electronics and Microelectronics, Instrumentation; Laserphysik; Ingenieurswesen, Maschinenbau allgemein; Elektronik; EA; BC

Overview of CCD.- CCD Imaging in the Ultraviolet (UV) Regime.- Silicon.- Silicon Dioxide.- Si-SiO2 Interface.- General Effects of Radiation.- Effects of Radiation on CCDs.- UV-Induced Effects in Si.- UV Laser Induced Effects in SiO2.- UV Laser Induced Effects at the Si-SiO2 Interface.- CCD Measurements at 157nm.- Design Optimizations for Future Research.- Concluding Remarks.
The first book to integrate CCD image sensor characteristics, their intrinsic instabilities, and the effect of UV radiation on device characteristics

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9783642061523 CCD Image Sensors in Deep-Ultraviolet: Degradation Behavior and Damage Mechanisms (Microtechnology and MEMS) (Li, Flora)


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